Feature
Inspection machine by scanned laser with AOD (Acousto-Optical-Deflector), which solved a mechanical vibration problem.
Simultaneous 3D/2D inspection.
Automatic adjustment function for optical system: Making measurement conditions uniform.
Simple recipe setting and operation: Chip data, wafer data and alignment data.
Multifaceted result display: Monitoring state of inspection and real-time display of results of each chip.